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Tunable Ionization Platform
Background Different molecules have different ionization energies. Commercially available photo-ionization detectors (PIDs) emit light to ionize the molecules of interest. However, these PIDs require distinct lamps dependent upon the ionization energy required. In fact there are four types of lamps available, each with a different, fixed ionization...
Published: 2/1/2021
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Inventor(s): Tanya Hutter, Vinaya Basavarajappa
Keywords(s):
Category(s): Physical sciences > Testing equipment, Physical sciences > Environment
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Wafer alignment with AFM metrology
BackgroundOne of the major challenges in nanoscale manufacturing is defect control. Optical inspection is not an option at the nanoscale level due to the diffraction limit of light, and without inspection high scrap rates can occur. One solution to this problem is inline metrology using atomic force microscopes (AFM). Single chip MEMS based AFMs have...
Published: 1/13/2021
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Inventor(s): Michael Cullinan, Andrew Duenner, Tsung-Fu Yao
Keywords(s):
Category(s): Physical sciences > Testing equipment, Physical sciences > Semiconductor
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Broad access to nanoscale technologies
BackgroundMiniaturization, or “small tech,” has revolutionized the world we live in today. It has transformed computers from gigantic rooms to the size of our palms, changed displays from being too bulky to carry to being wrappable like a plastic sheet, and allowed sensors to be ubiquitously present in our everyday lives, to name a few....
Published: 1/12/2021
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Inventor(s): S.V. Sreenivasan, Shrawan Singhal, Ovadia Abed, Lawrence Dunn, Aseem Sayal
Keywords(s):
Category(s): Physical sciences > Semiconductor, Physical sciences > Testing equipment
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